12 inch Prime Grade Silicon Wafer

DESO Technology Limited (Hong Kong) Silicon Wafers

DESO offers 12 inches diameter Prime Grade Silicon (Si) wafers, thickness 775 +/- 15 mm.

N-type and P-type are available. These wafers provide exceptional yield and superior quality.

As Si wafer size increases, the requirements to critical process parameters also become more stringent, including: oxygen content, radial uniformity of oxygen in wafer, impurity control, etc. Criteria for other parameter such as defect control, oxygen percipitation control, resistance quantification, doping, and radial uniformity are also tightened. As for prime 12 inches diameter Si wafers, TTV below 1.5 um and defect density ~ 0/cm^2 are typical criteria.

Product Specifications

Parameter

Value

Type of ingot

Grown according to Czochralski method

Diameter, mm

300 +/- 0.2

Dopant

B (boron)

Conductivity type

P

Oxigen max, OLD – PPMA

40

Carbon, PPMA

1

Crystallographic orientation

<100>

Deviation from the predetermined surface orientation of crystal plane, degrees

1

Volume resistivity, Ohm * cm

8-12

Primary Notch

Yes

Notch location

110

Notch size, mm

2.3

Notch Form

V

Wafer thickness, microns

775 +/- 15

Type of marking

Laser

Marking Location

back side

Edge profile

by SEMI T/4

Scratches on the front side

absent

Front side polishing

yes

side polishing

yes

Total change in wafer thickness (TTV), micrometers

1.5

Deflection (WARP), microns

30

The number of particles on a surface larger than 0.09 microns

30

Surface content of aluminum, E10AT/CM2

1

Surface content of calcium, E10AT/CM2

1

Surface content of chromium, E10AT/CM2

1

Surface content of copper, E10AT/CM2

1

Surface content of iron, E10AT/CM2

1

Surface content of potassium, E10AT/CM2

1

Surface content of natrium, E10AT/CM2

1

Surface content of nickel, E10AT/CM2

1

Surface content of zinc, E10AT/CM2

1

Packing Requirements:

ParameterValue
Type of PackagingMW300GT-A
Inner Container MaterialPolyethylene
Outer Packing MaterialAluminum
Number of units per packages25
ReusabilityYes

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Silicon Wafers